METHOD OF FORMING INSULATION FILM,申请号JP19970144878-传众专利搜索

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发明名称	METHOD OF FORMING INSULATION FILM
摘要
申请公布号	JPH10335322(A)	申请公布日期	1998.12.18
申请号	JP19970144878	申请日期	1997.06.03
申请人	NEC CORP	发明人	ENDO KAZUHIKO
分类号	H01L21/31;C23C16/26;C23C16/30;C23C16/44;C23C16/455;H01L21/312;H01L21/314;H01L21/316;H01L21/48;(IPC1-7):H01L21/314	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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