| 摘要 |
<p>A two-piece collimator (50) for use in high takeoff angle energy dispersive spectroscopy (EDS) is provided. The two-piece collimator (50) includes a base section (52) and an extension section (54). The collimator base section (52) may be attached rigidly to the end of an EDS detector tube (24). The collimator extension section (54) is removably attached to and extends from the base section (52). Apertures (58, 62) through the base and extension sections (52, 54) are easily aligned with each other and with an EDS detector (22). The length of the collimator extension section (54) is preferably selected such that the distal end (66) of the extension section (54) extends below the bottom of an upper pole piece (16) of an electron microscope in which the collimator (50) is employed. A two-piece collimator (50) in accordance with the present invention effectively reduces stray radiation, including back-scattered electrons, which may cause artifacts in a detected EDS X-ray spectrum. Alternatively, a collimator (50) in accordance with the present invention may be used in combination with an existing pole piece insert collimation device by removing the extension section (54) from the two-piece collimator (50).</p> |
