Device for measuring and regulating temperature of semiconducting plate

摘要

The device has a quartz chamber (1), which can be externally heated by infrared radiation (4). The device also has a support (2) for the semiconducting plate (3), a pyrometer for measuring the thermal radiation from the plate and a plate temperature regulator. The quartz chamber has an opening arranged above the plate and enclosed by a cooled quartz tube (5), which is covered at one end by a sapphire window (6). The pyrometer (8) registers thermal radiation in the range from 4.8 mu m to 5.3 mu m passing through the quartz tube and sapphire window to the pyrometer.