发明名称 Composite structure for electronic devices and method of making the same
摘要 <p>Composite structure for electronic devices has a growth substrate intermediate layer with a crystallographic lattice structure and a diamond layer on this. The intermediate layer has zinc blende, diamond of CaF2 structure and a fixed orientation between is lattice and that of the substrate. The difference between the lattice constants of the intermediate layer and substrate is less than 20%, esp. less than 10% at the beginning of the intermediate layer. At the junction between the intermediate and diamond layers, their lattice constants are given by the equation: (n*aI-m*aD) /n*aI = less than 0.2, esp. less than 0.1 (where n, m = natural numbers; aD = the lattice constant of the diamond layer; aI = the lattice constant of the intermediate layer at the junction with the diamond layer). Also claimed is a method of producing the composite. <IMAGE></p>
申请公布号 EP0681314(B1) 申请公布日期 1998.12.16
申请号 EP19950105623 申请日期 1995.04.13
申请人 DAIMLER-BENZ AKTIENGESELLSCHAFT 发明人 ZACHAI, REINHARD, DR.;FUESSER, HANS-JUERGEN, DR.;GUTHEIT, TIM
分类号 C30B25/18;H01L21/20;H01L29/16;H01L29/267;(IPC1-7):H01L21/20;C30B23/02;C30B25/02 主分类号 C30B25/18
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