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经营范围
发明名称
Sputtering cathode
摘要
申请公布号
GB9823092(D0)
申请公布日期
1998.12.16
申请号
GB19980023092
申请日期
1998.10.21
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG
发明人
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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