| 摘要 |
PURPOSE:To omit an electrolyte layer and to prevent the deterioration due to the formation of a gas transmitting film by sticking an electrolyte containing part and an electrode forming part comprising a plurality of electrodes whose parts are extending into a groove through an insulating film. CONSTITUTION:A plurality of substrates 1 are provided. One substrate 1 is an electrolyte containing part comprising an electrode containing groove 5 and a gas transmitting film 10 which is formed on the surface of the groove 5. The other substrate 1 is an electrode forming part comprising a plurality of electrodes 3a and 3b whose parts are extending into the groove 5. A plurality of the above described substrates 1 are stuck together through an insulating film 2. The groove 5 of one substrate 1 is formed by anisotropic etching, and the rear surface is covered with a hydrophobic insulator 7 which is hard to break. The groove 5 is filled with electrolyte when the electrodes 3a and 3b are used. Therefore, electrolyte is not formed, and the gas transmitting film 10 is not deteriorated. |
