| 摘要 |
<p>The object of the present invention is to provide a high-density ink-jet recording head provided with high resolution using thin film technique by preventing the characteristic of the displacement of a diaphragm from being deteriorated by the tension of the diaphragm, preventing the warp of a substrate from deteriorating the reliability and uniformity and preventing the looseness of the diaphragm from peeling a PZT film and from causing a failure of jetting. The above ink-jet recording head is constituted so that the tension of the diaphragm in which a silicon oxide film (50) with negative tension and a lower electrode film (60) with positive tension are combined is substantially zero or negative and tension obtained by adding the tension of a piezoelectric film (70) with positive tension to the tension of the diaphragm is positive. <IMAGE></p> |
