| 摘要 |
PURPOSE:To obviate the generation of the development defect of an object and to avert the wasteful renewal of a developing soln. by detecting the concn. of the cation of the base and the concn. of hydrogen ions in the alkaline developing soln. and the absorbance of the developing soln. CONSTITUTION:Water 3 in a test tank 2 is maintained at a specified temp. by a heater 4 and a cooler 5, by which the developing soln. 6 in a developing tank 1 is maintained at a constant temp. The concn. of Na<+> and the concn. of H<+> are measured by an Na<+> measuring instrument 11 and a pH measuring instrument 12. An Na<+> sensor 13, pH sensor 14 and absorbance measuring instrument 15 are provided. A resolution is good when the values of the concn. of the Na<+> and the pH are large or the absorbance is small in the relations between the concn. of the Na<+>, the pH (concn. of OH<->) and the absorbance as well as the resolution. The specified development power is, therefore, obtd. and the stable result of the developing soln. is obtd. if the concn. of the cation of the base and the concn. of the hydroxyl ions in the developing soln. and the absorbance are maintained in the adequate range. The developing device which does not generate the generation of the development defect of the object or averts the wasteful renewal of the developing soln. is obtd. in this way. |
