| 摘要 |
PROBLEM TO BE SOLVED: To produce a tin oxide-antimonous oxide sintered body target having mechanical and physical properties sufficient for withstanding utilization and to provide a method for producing the same. SOLUTION: This tin oxide-antimonous oxide sintered body target is the one having a compsn. contg. 3 to 10 wt.% Sb2 O3 , and the balance SnO2 with inevitable impurities and having 4.2 to 6.9 density. As for the producing method, raw material powder composed of SnO2 and Sb2 O3 powder is mixed, this raw material powder is filled into a carbon mold and is subjected to hot press molding by a hot pressing method to produce a sintered body, and this obtd. sintered body is subjected to machine to produce a sputtering target. |
