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发明名称
POSITIVE-WORKING RADIATION-SENSITIVE MIXTURES AND COPYING MATERIAL PRODUCED THEREFROM
摘要
申请公布号
KR0163953(B1)
申请公布日期
1998.12.15
申请号
KR19900014098
申请日期
1990.09.07
申请人
HOECHST AG
发明人
PAWLOWSKI, GEORG;MERREM, HANS-JOACHIM;LINGNAU, JUERGEN;DAMMEL, RALPH;ROESCHERT, HORST
分类号
G03F7/039;G03F7/004;G03F7/016;G03F7/075;H01L21/027;H01L21/30;(IPC1-7):G03F7/004
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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