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发明名称
DEVICE FOR HORIZONTALLY CONTROLLING LENS SUPPORTING FRAME OF STEPPER
摘要
申请公布号
KR0132209(Y1)
申请公布日期
1998.12.15
申请号
KR19960008178U
申请日期
1996.04.16
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
KONG, MYUNG-HWAN
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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