| 发明名称 |
VERFAHREN ZUR HERSTELLUNG EINER METALLSCHICHT |
| 摘要 |
A metal film forming method comprises steps of: forming a non-monocrystalline metal film principally composed of aluminum, in contact, at least in a part thereof, with a monocrystalline metal principally composed of aluminum; and heating the non-monocrystalline metal film to convert at least a part thereof into monocrystalline state. <IMAGE> |
| 申请公布号 |
AT174450(T) |
申请公布日期 |
1998.12.15 |
| 申请号 |
AT19910306118T |
申请日期 |
1991.07.05 |
| 申请人 |
TSUBOUCHI, KAZUO |
发明人 |
TSUBOUCHI, KAZUO;MASU, KAZUYA |
| 分类号 |
H01L21/321;H01L21/768;H01L23/532 |
主分类号 |
H01L21/321 |
| 代理机构 |
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代理人 |
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