发明名称 Vibration Actuator and adjustment method therefor
摘要 A vibration actuator is provided with a rectangular parallelepiped elastic member of which a surface bears electromechanical converting elements adhered thereto and a relative moving member maintained in pressure contact with the other surface of the elastic member. A driving voltage is applied to excite the electromechanical converting elements to generate, in the elastic member, a longitudinal vibration vibrating in a plane parallel to the surface of the elastic member contacting the relative moving member and a bending vibration vibrating in a direction crossing the contacting surface, thereby generating a relative motion between the elastic member and the relative moving member. The elastic member has working portions for adjusting the difference of the resonance frequencies of the longitudinal and bending vibrations.
申请公布号 US5850117(A) 申请公布日期 1998.12.15
申请号 US19960664124 申请日期 1996.06.14
申请人 NIKON CORPORATION 发明人 TOBE, MICHIHIRO;TAKAGI, TADAO
分类号 H01L41/09;(IPC1-7):H01L41/09;H01L41/04 主分类号 H01L41/09
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