| 摘要 |
PROBLEM TO BE SOLVED: To reduce the gas releasing velocity in the ultrahigh or extremely high vacuum region, to easily obtain ultrahigh or extremely high vacuum, and to obtain a vacuum vessel, etc., capable of maintaining this vacuum by forming a ceramic film on the surface part to be exposed to the air. SOLUTION: Because the dissolution of hydrogen from the air into a structural mateal, such as vacuum vessel, is inhibited by the ceramic film formed on the surface, on the air side, of the external wall of the vacuum vessel, etc., the amount of hydrogen transmitted through the wall body of the vacuum vessel, etc., is reduced, that is, the dissolution of hydrogen into the metallic structural mateal is a phenomenon resultant from the dissociation of hydrogen molecules into hydrogen atoms caused by the contact of the hydrogen molecules with the surface, on the air side, of the metallic structural mateal and the dissolution of hydrogen can be reduced if the eternal surface to be in contact with hydrogen molecules is coated with nonmetal such as ceramics. It is preferable to regulate the thickness of the ceramic film to 0.1 to 20μm. As the preferred ceramics, a monolayer film of a substance selected from TiN, TiC, Al2 O3 , etc., or a laminated film of them can be used.
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