发明名称 Segmented substrate for improved arc-jet diamond deposition
摘要 A mandrel for use in a diamond deposition process for generating free standing diamond films has a segmented surface forming a plurality of surfaces for deposition of diamond. The segmented surface is formed of a plurality of mesa segments on a common supporting base surfaces for the mesas. The mesa segments are preferably removably attached to the common base by any suitable means such as by bolts through the mandrel substrate which extend into the mesa segments. The mesa segments may vary in shape, size, and number, thus permitting different shaped diamond films to be made simultaneously from the same run if desired. The provided arrangement increases yield by reducing losses due to premature lifting of the diamond film during deposition, due to violent lifting after deposition upon cooling of the mandrel, and due to cracking.
申请公布号 US5849228(A) 申请公布日期 1998.12.15
申请号 US19970933328 申请日期 1997.09.18
申请人 SAINT-GOBAIN NORTON INDUSTRIAL CERAMICS CORPORATION 发明人 PATTON, JR., DONALD O.;GUARNACCIA, DAVID G.;FRYBURG, GEORGE A.
分类号 C30B25/02;C23C16/01;C23C16/26;C23C16/27;C30B29/04;(IPC1-7):C23C16/50;C23C16/00 主分类号 C30B25/02
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