Scanning probe microscope incorporating an optical microscope

摘要

A scanning probe microscope includes a unit for an SPM measurement on a sample and an optical system for observation of at least the sample. The SPM measurement unit includes a cantilever having a probe on its free end and a detection system for optically detecting the displacement of the cantilever. The detection system includes a source for emitting laser light. The observation optical system includes an objective lens opposed to the sample and an eyepiece enabling an observer's ocular observation. A laser shutter is located in an optical path between the objective lens and the eyepiece. The laser shutter has a switch for detecting its open/close operation. A logic circuit computes an output signal from the switch and an output signal from a controller. Based on the result of the computation, an LD switch circuit causes an LD driver to turn the light source on or off.