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发明名称
摘要
申请公布号
JP2836371(B2)
申请公布日期
1998.12.14
申请号
JP19920124815
申请日期
1992.05.18
申请人
NIPPON DENKI KK
发明人
AISO FUMINORI
分类号
H01L21/28;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/28
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