Volume flow control device for electrical test=tube pump

摘要

A gas pump (3) and a pressure sensor (4) are arranged in a hermetic gas flow system between two gas connection pieces (1,7). The pressure sensor measures the differential pressure across a flow resistance (5). The gas pump and pressure sensor are connected to a processing and control unit (6). The processing and control unit calculates the volume flow from the differential pressure in a predetermined time interval, sums the volume flow components and provides a comparison with final values. The gas pump is switched off when the final value is reached. The pressure sensor and flow resistance are arranged on the suction side or the pressure side of the pump.