NONSTICK LAYER FOR A MICROMECHANICAL COMPONENT

摘要

The invention relates to a method for producing micromechanical components or a micromechanical component. According to the invention, a moveable element (4) is produced on a sacrificial layer (2). The sacrificial layer (2) under the moveable element (4) is then removed, so that said moveable element (4) is able to move. After the sacrificial layer (2) has been removed, a protective layer (7) is deposited on a surface of the moveable element (4). Silicon oxide and/or silicon nitride are used for the protective layer (7).