| 摘要 |
<p> A very narrow band excimer laser. The very narrow bandwidth is achieved by using an etalon (44) as an output coupler in combination with a line narrowing element (18) located at the rear of the laser. Preferred embodiments are capable of producing 10 mJ laser pulses at 1000 Hz with a 95% integral bandwidth of less than 1.5 pm.</p> |
