MINIATURE MICROMACHINED QUADRUPOLE MASS SPECTROMETER ARRAY AND METHOD OF MAKING THE SAME
摘要
The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignement for use in a final quadrupole mass spectrometer device.
申请公布号
WO9856023(A2)
申请公布日期
1998.12.10
申请号
WO1998US11130
申请日期
1998.06.02
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人
BRENNEN, REID, A.;WIBERG, DEAN;CHUTJIAN, ARA;HECHT, MICHAEL;ORIENT, OTTO