| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a semiconductor which does not require a highly skilled operator and can perform a re-teaching operation quickly automatically with constant accuracy. SOLUTION: Deviations of a new boat after replacement in the directions of x-, y-, z-axes are found, based on the position data of a reflector detected by detecting means 10. Position data of the transfer unit 4 of an old boat stored in a memory 14 are compensated by the deviations. Then, the actual process of loading a wafer 1 into the loading groove of a boat 2A is performed, based on the position data after the compensation.</p> |
