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发明名称
PROBE EQUIPMENT AND LOW TEMPERATURE INSPECTION METHOD
摘要
申请公布号
JPH10321683(A)
申请公布日期
1998.12.04
申请号
JP19970144728
申请日期
1997.05.19
申请人
TOKYO ELECTRON LTD
发明人
AMAMIYA HIROSHI
分类号
G01R1/04;G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/04
代理机构
代理人
主权项
地址
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