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经营范围
发明名称
PLASMA TREATMENT SYSTEM
摘要
申请公布号
JPH10321595(A)
申请公布日期
1998.12.04
申请号
JP19970144563
申请日期
1997.05.20
申请人
TOKYO ELECTRON LTD
发明人
KOSHIMIZU CHIEN
分类号
H01L21/302;C23C14/22;C23C16/44;C23C16/455;H01J37/32;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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