| 摘要 |
<p>PROBLEM TO BE SOLVED: To protect a chuck against eroding in an erosive process gas environment and to prevent a leakage of heat transfer gas from below a substrate. SOLUTION: A sealing structure or assembly 20 is used to form a seal around a chuck 30 that holds and supports a substrate 45 having a peripheral edge 50. An actuated, position-adjustable, sealing diaphragm 165 is disposed along the peripheral edge of the substrate 45. The diaphragm 165 has a conformal sealing surface 170, capable of forming a seal when pressed against the peripheral edge of the substrate 45. A diaphragm actuator 175 actuates the sealing diaphragm 165 from (a) a first non-sealing position, where the conformal sealing surface 170 of the diaphragm 165 is spaced apart from the substrate 45 held on the chuck 30 to form a gap 190 therebetween, to (b) a second sealing position 185, where the conformal sealing surface 170 of the diaphragm 165 presses against, and forms a seal with the peripheral edge of the substrate 45.</p> |
