发明名称 HERMETIC PACKAGE
摘要 PROBLEM TO BE SOLVED: To reduce or remove gaseous hydrogen from the interior of a package, by a method wherein a package structure is constituted into such a form that a second layer prevents a surface oxide layer from being formed and the hydrogen, which is moved from the periphery of the package to a first layer, is fixed as a hydride. SOLUTION: Hydrogen to come out from the atmosphere in a package is absorbed in the surface of a second layer 32 and is turned into a hydrogen solvent compound, whereby the compound penetrates into the interior of the layer 32. The hydrogen solvent compound is moved into the interior of a first layer 33 by an endothermic reaction which generates 1.1 eV per atom. The compound is precipitated (fixed) as a titanium halide by another endothermic reaction which generates 0.2 eV per atom. This endothermic reaction functions so as to fix the hydrogen in the layer 33 made of titanium and prevents the hydrogen from returning to the layer 32. When the layer 32 made of a noble metal is used, the reactivity of the hydrogen and the formation of the oxidized surface of the layer 33 made of the metal are prevented by the layer 32, whereby the surface of a package structure is maintained in an open state to make easy to accept the hydrogen.
申请公布号 JPH10322044(A) 申请公布日期 1998.12.04
申请号 JP19980129975 申请日期 1998.05.13
申请人 LUCENT TECHNOL INC 发明人 DERKITS JR GUSTAV EDWARD;LOPATA JOHN;NASH FRANKLIN RICHARD
分类号 G02B6/42;H01L23/26;H01S5/022;H05K5/06;(IPC1-7):H05K5/06 主分类号 G02B6/42
代理机构 代理人
主权项
地址