| 摘要 |
PROBLEM TO BE SOLVED: To improve workability productivity by forming hard-coating layers, antireflection films and water repellent coating layers on spectacle lenses with a series of devices without exposing process chambers to the atm. SOLUTION: This apparatus is successively provided with hard-coating chambers 45, 47 which form the hard-coating layers on the surfaces of the spectacle lenses 13 under a vacuum atmosphere, an antireflection coating chamber 49 which forms the antireflection film on the surfaces of the spectacle lenses under the vacuum atmosphere and a water repellent coating chamber 53 which forms the water repellent coating layers on the surfaces of the spectacle lenses under the vacuum atmosphere. A substrate holder mounted with the spectacle lenses is transported in the respective chambers described above without exposing the respective chambers to the atm, by which the hard-coating layers, the antireflection films and the water repellent coating layers are successively formed on the surfaces of the spectacle lenses. |
