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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10321644(A)
申请公布日期
1998.12.04
申请号
JP19970128708
申请日期
1997.05.19
申请人
SONY CORP
发明人
WADA SHINICHI
分类号
H01L29/808;H01L21/337;(IPC1-7):H01L21/337
主分类号
H01L29/808
代理机构
代理人
主权项
地址
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