| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a carrier placing mechanism which does not hinder a carrier transfer by reducing a space for installation of a wafer detecting unit and can surely detect the presence or absence of a wafer with high accuracy, irrespective of the optical accuracy of a carrier. SOLUTION: In this mechanism 10, wafer-detecting means 14 for detecting each wafer in a carrier main body 21 on a carrier rest 11 is provided on the carrier rest 11. In the wafer-detecting means 14, a light-emitting element 14A and a lightreceiving element 14B are disposed above and below a wafer. A holding body 14C holds these elements 14A, 14B and is driven by an air cylinder 14E between the position, where the wafer is sandwiched and the outside of the carrier body 21.</p> |
