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发明名称
PHYSICAL AND CHEMICAL TREATMENT SYSTEM, AND METHOD FOR PREVENTING DETERIORATION OF AIR-TIGHT HOLDING MEMBER
摘要
申请公布号
JPH10321600(A)
申请公布日期
1998.12.04
申请号
JP19970128436
申请日期
1997.05.19
申请人
SONY CORP
发明人
KAWASHIMA MASAHITO
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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