WAFER-TRANSFER DEVICE WITH WAFER ERRONEOUS MOUNT DETECTION SENSOR, SEMICONDUCTOR-MANUFACTURING DEVICE WITH THE SAME, AND WAFER-TRANSFER METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a wafer-transfer device for detecting an erroneously mounted wafer, a semiconductor-manufacturing device with the device, and a method for transferring wafers using the wafer-carrying device. SOLUTION: A number of photosensors 120 are provided at the vertical position of a wafer diameter where a plurality of wafers 114 are aligned before they are separated from a cassette 116 and are carried into a semiconductor- manufacturing device. Then, a wafer-transfer device 99 is used and the photosensors 120 are operated along the outer-periphery surface of the wafers 114 and light is applied, thus detecting whether the wafers 114 are mounted by mistake.