| 摘要 |
PROBLEM TO BE SOLVED: To improve the adhesion of a protection film and to improve reliability by providing a contact layer improving adhesion with the protection film on the upper electrode of a solar battery element. SOLUTION: P-type, I-type and n-type amorphous silicon layers 106 are stacked on a lower electrode 104 being the transparent conductive film of ITO and SnO2 , which is provided on a substrate. An upper electrode 108 formed on the layer 106 is the metallic film of Al and the protection film 112 covers the element through the adhered layer 110 on the metallic film. The contact layer 110 is the metallic film of a material similar to the upper electrode 108 and its surface is rougth with a specified film forming condition. The average surface roughness of a resin coated face 110a being the surface is set to be 10-100 nm. Since the contact layer of specified surface roughens is provided on the upper electrode, a contact area with the protection increases, the adhesion of the protection film is improved and the reliability of the element can be improved. |
