| 摘要 |
PROBLEM TO BE SOLVED: To reduce reticle carriage time and improve efficiency of reticle carriage system, by installing a bar code reading means at a position where a bar code written in a substrate housing or a substrate can be read just before delivery to a semiconductor manufacturing equipment. SOLUTION: In a semiconductor manufacturing equipment 1 including a bar code reader, a reticle cassette transfer port 2 and the bar code reader 3 are set outside the equipment, but arranged at positions where the bar code can be read. The bar code of a cassette 4 is read by the bar code reader 3, while an AGV robot 5 carries a cassette 4 accommodating a reticle, and delivers the cassette 4 to a cassette receiving position 2 on the semiconductor manufacturing equipment. In the case that the reticle is correct, the delivery to the semiconductor manufacturing equipment 1 is performed. In the case that the reticle is not correct, the AGV robot 5 keeps holding the cassette. |
