| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the surface of a semiconductor layer and prevent corrosion due to invaded moisture, by a method wherein a window layer and a protective layer of AlGaAs based compound semiconductors in which a mixed crystal ratio of Al is in a specific range are laminated on a surface of a luminescent layer forming part. SOLUTION: A light-emitting layer forming part 11 is composed of AlGaAs based compound semiconductors to form a light-emitting layer and is epitaxially grown on an n type GaAs substrate 1. A p type window layer 6 composed of the AlGaAs based compound semiconductors represented by Aly Ga1-y As (wherein, 0.6<=y<=0.8) is formed on a surface of this light-emitting layer forming part 11, and further a p type protection layer 7 composed of the AlGaAs based compound semiconductors represented Alz Ga1-z As (wherein, 0.45<=z<=0.6) having a smaller mixed crystal ratio of Al than the window layer 6 is formed on the surface. As described above, the protective layer 7 having the smaller mixed crystal ratio of Al than the window layer 6 is formed, thereby hardly reacting with moisture. |
