PRODUCTION OF FINE PATTERN

摘要

PROBLEM TO BE SOLVED: To inexpensively produce fine patterns of high accuracy by improving the reliability and durability of a master plate in a process for producing the fine patterns by a transfer method. SOLUTION: Groove parts 3 having the reverse patterns of the fine patterns of prescribed shapes are formed on the surface of a metallic substrate 1 by a prescribed processing method. Insulative low melting glass 5 consisting essentially of lead oxide or tellurium oxide is melted and is packed into these groove parts 3. Thereafter, the surface described above of the metallic substrate 1 is subjected to polishing, by which the master plate for transfer comprising metallic electrode parts 7 and insulating parts 6 consisting of the low melting glass 5 is manufactured. The fine pattern thin films are formed by an electrodeposition method or plating method on the electrode parts 7 via water-repellent release layers on this master plate. At least these fine pattern thin films are transferred to another substrate.