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发明名称	PLASMA TREATMENT DEVICE
摘要
申请公布号	JPH10321607(A)	申请公布日期	1998.12.04
申请号	JP19970147338	申请日期	1997.05.21
申请人	RICOH CO LTD	发明人	FUJIMOTO TAKAAKI;HIROSE TAISEI
分类号	H05H1/46;C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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