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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10321651(A)
申请公布日期
1998.12.04
申请号
JP19970128375
申请日期
1997.05.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
YOSHIDA TAKANOBU
分类号
H01L23/12;H01L21/52;(IPC1-7):H01L21/52
主分类号
H01L23/12
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代理人
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