发明名称 |
SENSOR DEVICE AND METHOD OF FORMING A SENSOR DEVICE |
摘要 |
A sensor device (20) comprises a sensor package (22) having a cavity (24) formed therein, a sensor die (26) mounted on a bottom surface (28) of the cavity (24) and a protective coating (30) formed over the sensor die in the cavity. The protective coating (30) is formed from a material, preferably a polymer material, which is arranged to have a graduated cross-linking density such that the material at the top of the cavity (24) has a high density of cross-linking and the material at the bottom of the cavity (24), which material is in contact with the sensor die, has a low density of cross-linking. |
申请公布号 |
WO9854556(A2) |
申请公布日期 |
1998.12.03 |
申请号 |
WO1998EP03192 |
申请日期 |
1998.05.28 |
申请人 |
MOTOROLA SEMICONDUCTEURS S.A.;OSAJDA, MARC;PERRAUD, ERIC |
发明人 |
OSAJDA, MARC;PERRAUD, ERIC |
分类号 |
G01L9/04;G01L9/00 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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