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发明名称
ETCHING DEVICE
摘要
申请公布号
JPH10317168(A)
申请公布日期
1998.12.02
申请号
JP19970123717
申请日期
1997.05.14
申请人
SHARP CORP
发明人
MATSUKURA ISAKAZU;FUKAMI SEIJI
分类号
C23F1/08;H01L21/306;(IPC1-7):C23F1/08
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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