| 摘要 |
PROBLEM TO BE SOLVED: To improve the flatness of a work after it is ground, by preventing air from entering when mounting an abrasive cloth and a backing pad on the turntable and the holding plate of a surface grinding device. SOLUTION: A surface grinding device comprises a turntable 1, a grinding head, an abrasive supply nozzle, and a dressing head. An abrasive cloth is bonded to the top surface of the turntable 1. The grinding head comprises a rotating and pressing mechanism, a shaft and a holding plate 7. A backing pad is bonded to the underside of the holding plate 7. A wafer is sucked by the backing pad to be set on the grinding head. Further, the turntable 1 has grid-shaped grooves 21 on the whole surface and the holding plate 7 also has grid-shaped grooves 31 on the whole surface. |
