| 发明名称 |
BISTABLE MICROACTUATOR WITH COUPLED MEMBRANES |
| 摘要 |
A bistable electrostatic actuator with pneumatic or liquid coupling. The actuator has enclosed metallic electrodes. It can be used for a microvalve or micropump. The actuator has buckled membrane sections in pairs and curved substrate electrodes, locally associated with said membrane sections. |
| 申请公布号 |
EP0880817(A1) |
申请公布日期 |
1998.12.02 |
| 申请号 |
EP19970904396 |
申请日期 |
1997.02.10 |
| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
QUENZER, HANS, JOACHIM;WAGNER, BERND |
| 分类号 |
B81B3/00;B81C1/00;F04B43/04;F15C3/04;F15C5/00;F16K99/00;H01H59/00;H01L41/22;H02N1/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
