| 摘要 |
<p>PROBLEM TO BE SOLVED: To decrease the defects of coating films, such as unequal film thickness distribution and coating distribution, for affecting the functions of thin films by film thickness with a coating applicator for forming thin films, such as color filters. SOLUTION: A compounding tank 16 having a stirrer and viscometer 14 in a circulating route in order to control a coating liquid viscosity having a correlative relation to a constant value is installed as a means for suppressing the coating film thickness distribution. A solvent and coating liquid 17 are compounded while the viscosity is measured therein, by which the coating is executed while the fluctuation in the viscosity of the coating liquid 17 is controlled to±1 to±5%. As a result, the waste liquid of the coating layer 17 is eliminated and, therefore, the consumption thereof is reduced. The coating system is a bar coating system. The shape defects of the members for supporting the coating bars are eliminated and the defects of the coating films are decreased by the structure of separating the coating layer contact parts.</p> |
