REACTIVE SPUTTERING PROCESS,申请号EP19960900864-传众专利搜索

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发明名称	REACTIVE SPUTTERING PROCESS
摘要
申请公布号	EP0812368(B1)	申请公布日期	1998.12.02
申请号	EP19960900864	申请日期	1996.01.23
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	FRACH, PETER;GOTTFRIED, CHRISTIAN;WALDE, HENDRIK;GOEDICKE, KLAUS
分类号	C23C14/35;C23C14/00;C23C14/54;H01J37/34;(IPC1-7):C23C14/00	主分类号	C23C14/35
代理机构		代理人
主权项
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