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发明名称
ARRANGEMENT FOR THE TESTING OF SEMICONDUCTOR STRUCTURES
摘要
申请公布号
EP0880706(A1)
申请公布日期
1998.12.02
申请号
EP19970917220
申请日期
1997.02.12
申请人
KARL SUSS DRESDEN GMBH
发明人
WELSCH, REINHARD;DIETRICH, CLAUS;HUELSMANN, THOMAS;RUNGE, DIETMAR
分类号
G01R31/28;(IPC1-7):G01R1/073
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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