| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the reattachment of the contaminant to a substrate after the treatment, by installing the first suction pad and the second suction pad for sucking a substrate onto an upper face of an arm, in such manner that the upper faces thereof are positioned at the same height. SOLUTION: An upper face of an arm 21 comprises, for example, three first suction pads 31 and three second suction pads 32. These suction pads are switched between a condition that a lower face of a substrate W is sucked onto the upper face of the arm 21 only by the first suction pads 31, and a condition that the lower face of the substrate W is sucked onto the upper face of the arm 21 only by the second suction pads 32. The substrate W before the washing, is sucked only by the first suction pads 31, and the substrate W after the washing, is sucked only by the second suction pads 32, so that the possibility of the reattachment of the contaminant to the substrate W after the washing, can be prevented, even when the contaminant is attached to the first suction pads 31 from the substrate W before the washing.</p> |
