| 摘要 |
<p>When green sheets are laminated and integrally fired for a window spacer plate 26 formed with at least a plurality of windows 29, a covering plate 25 for covering the windows 29, and a through hole plate 27 having through holes, 22, 23, communicating with the windows 29, it is arranged to make a ratio t/w of thickness t of the window spacer place 26 to length w of the through holes, 22, 23 in its minor axis direction one or more, and to form a functional film actuator 33 on the outer surface of the covering plate 25 after firing. A gap (separation) is prevented from being generated in the interface between each ceramics plate in producing a ceramics substrate used for the functional film element.</p> |
