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发明名称	FORMATION OF METALLIC FILM
摘要
申请公布号	JPH10317155(A)	申请公布日期	1998.12.02
申请号	JP19970132210	申请日期	1997.05.22
申请人	CANON INC	发明人	MATSUDA HIROSHI
分类号	C23C18/28;C23C18/31;(IPC1-7):C23C18/31	主分类号	C23C18/28
代理机构		代理人
主权项
地址

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