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发明名称
SELF-ALIGNED ISOLATION AND PLANARIZATION PROCESS FOR MEMORY ARRAY
摘要
申请公布号
EP0846337(A4)
申请公布日期
1998.12.02
申请号
EP19970932581
申请日期
1997.06.23
申请人
MACRONIX AMERICA INC.
发明人
CHANG, YUN
分类号
H01L21/76;H01L21/762;H01L21/8246;H01L21/8247;H01L27/112;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/336
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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