| 发明名称 |
METAL POLYOXYALKYLATED PRECURSOR SOLUTIONS IN AN OCTANE SOLVENT AND METHOD OF MAKING THE SAME |
| 摘要 |
A liquid precursor solution for use according to a method of manufacturing metal oxide electronic components (10) includes a polyoxyalkylated metal complex dispersed in an alkane solvent. The alkane solvent is preferably n-octane. |
| 申请公布号 |
EP0777762(B1) |
申请公布日期 |
1998.12.02 |
| 申请号 |
EP19950930181 |
申请日期 |
1995.08.15 |
| 申请人 |
SYMETRIX CORPORATION |
发明人 |
SCOTT, MICHAEL C.;PAZ DE ARAUJO, CARLOS A. |
| 分类号 |
C01G35/00;C07F9/94;C23C18/12;C30B7/00;C30B29/30;C30B29/68;H01L21/316;H01L21/822;H01L27/04 |
主分类号 |
C01G35/00 |
| 代理机构 |
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代理人 |
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