METHOD AND DEVICE FOR CONTROL OF A VACUUM VAPORIZATION PROCESS,申请号EP19970914143-传众专利搜索

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发明名称	METHOD AND DEVICE FOR CONTROL OF A VACUUM VAPORIZATION PROCESS
摘要
申请公布号	EP0880606(A1)	申请公布日期	1998.12.02
申请号	EP19970914143	申请日期	1997.02.07
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	GOEDICKE, KLAUS, DIPL.-PHYS.;SCHEFFEL, BERT, DIPL.-PHYS.;METZNER, CHRISTOPH, DIPL.-PHYS.
分类号	C03C17/00;C23C14/54;(IPC1-7):C23C14/54;C23C14/24	主分类号	C03C17/00
代理机构		代理人
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